The Normal Condition of Squeeze-film Damping Model for Torsion Micro-Resonators
نویسندگان
چکیده
منابع مشابه
Uncertainty quantification models for micro-scale squeeze-film damping
Two squeeze-film gas damping models are proposed to quantify uncertainties associated with the gap size and the ambient pressure. Modeling of gas damping has become a subject of increased interest in recent years due to its importance in micro-electro-mechanical systems (MEMS). In addition to the need for gas damping models for design of MEMS with movable micro-structures, knowledge of paramete...
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ژورنال
عنوان ژورنال: IOP Conference Series: Materials Science and Engineering
سال: 2017
ISSN: 1757-8981,1757-899X
DOI: 10.1088/1757-899x/265/1/012022